Analog Electronics for Scientific Application

Format: Paperback

Language: English

Format: PDF / Kindle / ePub

Size: 12.21 MB

Downloadable formats: PDF

The circuit technology used transistors with additional base resistors compared to the DCTL (direct-coupled-transistor-logic) technology to which Khambata refers. Specialty wafer fab processing: epitaxy, SiGe, epi, diffusion and oxidation, ion implant, LPCVD and PECVD Si3N4, SiO2, platinum silicidation, photo-lithography, plasma etching, silicon micro-machining by KOH anisotropic etch, sputter depositions of Ti/Ni/Ag lift off process, Ti/Pt/Au lift off process, sputter depositions of thin film resistors: SiCr, NiCr, TaN2, silicon wafers back grind and polish followed by trimetal backside sputter depositions, gold backside sputter depositions and alloy: gold electroplating and gold bump.

Pages: 500

Publisher: Wadsworth Pub Co (March 1982)

ISBN: 0534010156

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